Aamod Shanker

@inproceedings{gunjala2018field,

title = {Field-varying aberration recovery in EUV microscopy using mask roughness},

author = { Gautam Gunjala and Antoine Wojdyla and Aamod Shanker and Stuart Sherwin and Markus P Benk and Kenneth A Goldberg and Patrick P Naulleau and Laura Waller},

url = {https://www.osapublishing.org/abstract.cfm?uri=COSI-2018-CW2E.2},

year  = {2018},

date = {2018-06-25},

booktitle = {Computational Optical Sensing and Imaging},

pages = {CW2E--2},

organization = {Optical Society of America},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{shanker2018speckle,

title = {Speckle metrology for extreme ultra-violet lithography},

author = { Aamod Shanker and Laura Waller and Gautam Gunjala and Antoine Wojdyla and Dmitriy Voronov and Patrick P Naulleau},

url = {https://doi.org/10.1117/12.2299605},

doi = {10.1117/12.2299605},

year  = {2018},

date = {2018-06-01},

booktitle = {Extreme Ultraviolet (EUV) Lithography IX},

volume = {10583},

pages = {105830T},

organization = {International Society for Optics and Photonics},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{shanker2018linear,

title = {Linear scattering theory in phase space (Conference Presentation)},

author = { Aamod Shanker and Laura Waller},

year  = {2018},

date = {2018-01-01},

booktitle = {Image Sensing Technologies: Materials, Devices, Systems, and Applications V},

volume = {10656},

pages = {106560T},

organization = {International Society for Optics and Photonics},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{shanker2018turbulent,

title = {Turbulent flow in coherent speckle},

author = { Aamod Shanker and Girish Nivarti and Laura Waller and Carola Bibiane-Schönlieb},

year  = {2018},

date = {2018-01-01},

booktitle = {Mathematics in Imaging},

pages = {MW3D--6},

organization = {Optical Society of America},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{shanker2017euv,

title = {EUV mask roughness can recover litho-tool aberrations (Conference Presentation)},

author = { Aamod Shanker and Laura Waller and Antoine Wojdyla and Markus P Benk and Kenneth A Goldberg and Patrick P Naulleau},

year  = {2017},

date = {2017-01-01},

booktitle = {International Conference on Extreme Ultraviolet Lithography 2017},

volume = {10450},

pages = {104500S},

organization = {International Society for Optics and Photonics},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{shanker2016off,

title = {Off-axis aberration estimation in an EUV microscope using natural speckle},

author = { Aamod Shanker and Antoine Wojdyla and Gautam Gunjala and Jonathan Dong and Markus P Benk and Andrew R Neureuther and Kenneth A Goldberg and Laura Waller},

url = {https://www.osapublishing.org/abstract.cfm?uri=ISA-2016-ITh1F.2},

year  = {2016},

date = {2016-07-25},

booktitle = {Imaging Systems and Applications},

pages = {ITh1F--2},

organization = {Optical Society of America},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{gunjala2016optical,

title = {Optical transfer function characterization using a weak diffuser},

author = { Gautam Gunjala and Aamod Shanker and Volker Jaedicke and Nick Antipa and Laura Waller},

url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9713/1/Optical-transfer-function-characterization-using-a-weak-diffuser/10.1117/12.2213271.short?SSO=1},

year  = {2016},

date = {2016-03-25},

booktitle = {Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXIII},

volume = {9713},

pages = {971315},

organization = {International Society for Optics and Photonics},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{shanker2015recovering,

title = {Recovering curl using an iterative solver for the transport of intensity equation},

author = { Aamod Shanker and Lei Tian and Martin Sczyrba and Brid Connolly and Andrew R Neureuther and Laura Waller},

url = {https://doi.org/10.1364/ISA.2015.ITh2A.5},

doi = {10.1364/ISA.2015.ITh2A.5},

year  = {2015},

date = {2015-06-07},

booktitle = {Imaging Systems and Applications},

pages = {ITh2A--5},

organization = {Optical Society of America},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{hu2015x,

title = {X-ray phase imaging and computed tomography with sandpaper analyzer},

author = { Yao Hu and Michael Chen and Li-Hao Yeh and Dilworth Parkinson and Aamod Shanker and Alastair MacDowell and Laura Waller},

url = {https://doi.org/10.1364/COSI.2015.CM3E.6},

doi = {10.1364/COSI.2015.CM3E.6},

year  = {2015},

date = {2015-06-07},

booktitle = {Computational Optical Sensing and Imaging},

pages = {CM3E--6},

organization = {Optical Society of America},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{shanker2015characterizing,

title = {Characterizing the dependence of thick-mask edge effects on illumination angle using AIMS images},

author = { Aamod Shanker and Martin Sczyrba and Falk Lange and Brid Connolly and Andrew R Neureuther and Laura Waller},

year  = {2015},

date = {2015-01-01},

booktitle = {Optical Microlithography XXVIII},

volume = {9426},

pages = {94260O},

organization = {International Society for Optics and Photonics},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{shanker2015absorber,

title = {Absorber topography dependence of phase edge effects},

author = { Aamod Shanker and Martin Sczyrba and Brid Connolly and Laura Waller and Andrew R Neureuther},

year  = {2015},

date = {2015-01-01},

booktitle = {Photomask Technology 2015},

volume = {9635},

pages = {96350G},

organization = {International Society for Optics and Photonics},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{shanker2014defocusb,

title = {Defocus-based quantitative phase imaging by coded illumination},

author = { Aamod Shanker and Lei Tian and Laura Waller},

url = {https://doi.org/10.1117/12.2039977},

doi = {10.1117/12.2039977},

year  = {2014},

date = {2014-06-03},

booktitle = {Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI},

volume = {8949},

pages = {89490R},

organization = {International Society for Optics and Photonics},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{shanker2014critical,

title = {Critical assessment of the transport of intensity equation as a phase recovery technique in optical lithography},

author = { Aamod Shanker and Martin Sczyrba and Brid Connolly and Franklin Kalk and Andrew R Neureuther and Laura Waller},

url = {https://doi.org/10.1117/12.2048278},

doi = {10.1117/12.2048278},

year  = {2014},

date = {2014-03-31},

booktitle = {Optical Microlithography XXVII},

volume = {9052},

pages = {90521D},

organization = {International Society for Optics and Photonics},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{shanker2013analysis,

title = {Analysis of edge effects in attenuating phase-shift masks using quantitative phase imaging},

author = { Aamod Shanker and Martin Sczyrba and Brid Connolly and Andrew R Neureuther and Laura Waller},

url = {https://doi.org/10.1117/12.2027825},

doi = {10.1117/12.2027825},

year  = {2013},

date = {2013-09-10},

booktitle = {Photomask Technology 2013},

volume = {8880},

pages = {88802A},

organization = {International Society for Optics and Photonics},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}